10/13/2010	9:48:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2010	9:48:08 AM	Recipe started at 9:48 AM
10/13/2010	9:48:08 AM	H2 valve closed
10/13/2010	9:48:08 AM	BCl3 valve closed
10/13/2010	9:48:08 AM	PH3 valve closed
10/13/2010	9:48:08 AM	SiCl4 pre valve closed
10/13/2010	9:48:08 AM	SiCl4 post valve closed
10/13/2010	9:48:08 AM	Main Vac valve closed
10/13/2010	9:48:08 AM	Bypass valve closed
10/13/2010	9:48:08 AM	Bubbler valve closed
10/13/2010	9:48:08 AM	Helium valve opened
10/13/2010	9:48:08 AM	Helium MFC set to  500.000000
10/13/2010	9:48:08 AM	H2 MFC set to  0.000000
10/13/2010	9:48:08 AM	BCl3 MFC set to  0.000000
10/13/2010	9:48:08 AM	PHl3 MFC set to  0.000000
10/13/2010	9:48:08 AM	SiCl4 MFC set to  0.000000
10/13/2010	9:48:08 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	9:48:09 AM	Tube furnace set to 0
10/13/2010	9:49:29 AM	Helium valve closed
10/13/2010	9:49:29 AM	H2 valve closed
10/13/2010	9:49:29 AM	BCl3 valve closed
10/13/2010	9:49:29 AM	PH3 valve closed
10/13/2010	9:49:29 AM	SiCl4 pre valve closed
10/13/2010	9:49:29 AM	SiCl4 post valve closed
10/13/2010	9:49:29 AM	Main Vac valve closed
10/13/2010	9:49:29 AM	Bypass valve closed
10/13/2010	9:49:29 AM	Bubbler valve closed
10/13/2010	9:49:29 AM	Helium MFC set to  0.000000
10/13/2010	9:49:29 AM	H2 MFC set to  0.000000
10/13/2010	9:49:29 AM	BCl3 MFC set to  0.000000
10/13/2010	9:49:29 AM	PHl3 MFC set to  0.000000
10/13/2010	9:49:29 AM	SiCl4 MFC set to  0.000000
10/13/2010	9:49:29 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	9:49:29 AM	Tube furnace set to 0
10/13/2010	9:49:29 AM	Run finished at 9:49 AM
10/13/2010	9:49:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/13/2010	9:52:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	9:52:29 AM	Recipe started at 9:52 AM
10/13/2010	9:52:29 AM	Helium valve closed
10/13/2010	9:52:29 AM	H2 valve closed
10/13/2010	9:52:29 AM	BCl3 valve closed
10/13/2010	9:52:29 AM	PH3 valve closed
10/13/2010	9:52:29 AM	SiCl4 pre valve closed
10/13/2010	9:52:29 AM	SiCl4 post valve closed
10/13/2010	9:52:29 AM	Main Vac valve closed
10/13/2010	9:52:29 AM	Bubbler valve closed
10/13/2010	9:52:29 AM	Bypass valve opened
10/13/2010	9:52:29 AM	Helium MFC set to  0.000000
10/13/2010	9:52:29 AM	H2 MFC set to  0.000000
10/13/2010	9:52:29 AM	BCl3 MFC set to  0.000000
10/13/2010	9:52:29 AM	PHl3 MFC set to  0.000000
10/13/2010	9:52:29 AM	SiCl4 MFC set to  0.000000
10/13/2010	9:52:29 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	9:52:29 AM	Tube furnace set to 0
10/13/2010	9:53:15 AM	Helium valve closed
10/13/2010	9:53:15 AM	H2 valve closed
10/13/2010	9:53:16 AM	BCl3 valve closed
10/13/2010	9:53:16 AM	PH3 valve closed
10/13/2010	9:53:16 AM	SiCl4 pre valve closed
10/13/2010	9:53:16 AM	SiCl4 post valve closed
10/13/2010	9:53:16 AM	Bubbler valve closed
10/13/2010	9:53:16 AM	Main Vac valve opened
10/13/2010	9:53:16 AM	Bypass valve opened
10/13/2010	9:53:16 AM	Helium MFC set to  0.000000
10/13/2010	9:53:16 AM	H2 MFC set to  0.000000
10/13/2010	9:53:16 AM	BCl3 MFC set to  0.000000
10/13/2010	9:53:16 AM	PHl3 MFC set to  0.000000
10/13/2010	9:53:16 AM	SiCl4 MFC set to  0.000000
10/13/2010	9:53:16 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	9:53:16 AM	Tube furnace set to 0
10/13/2010	9:53:16 AM	Run finished at 9:53 AM
10/13/2010	9:53:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	11:12:40 AM	Program exited cleanly
10/13/2010	11:16:21 AM	Program started normally
10/13/2010	11:16:23 AM	Helium valve closed
10/13/2010	11:16:23 AM	H2 valve closed
10/13/2010	11:16:23 AM	BCl3 valve closed
10/13/2010	11:16:23 AM	PH3 valve closed
10/13/2010	11:16:23 AM	SiCl4 pre valve closed
10/13/2010	11:16:23 AM	SiCl4 post valve closed
10/13/2010	11:16:23 AM	Main Vac valve closed
10/13/2010	11:16:23 AM	Bypass valve closed
10/13/2010	11:16:23 AM	Bubbler valve closed
10/13/2010	11:16:23 AM	Helium MFC set to  0.000000
10/13/2010	11:16:23 AM	H2 MFC set to  0.000000
10/13/2010	11:16:23 AM	BCl3 MFC set to  0.000000
10/13/2010	11:16:23 AM	PHl3 MFC set to  0.000000
10/13/2010	11:16:23 AM	SiCl4 MFC set to  0.000000
10/13/2010	11:16:23 AM	Bypass solenoid MFC set to  760.000000
10/13/2010	11:16:23 AM	Tube furnace set to 0
10/13/2010	11:16:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	11:16:24 AM	Recipe started at 11:16 AM
10/13/2010	11:16:24 AM	Helium valve closed
10/13/2010	11:16:24 AM	H2 valve closed
10/13/2010	11:16:24 AM	BCl3 valve closed
10/13/2010	11:16:24 AM	PH3 valve closed
10/13/2010	11:16:24 AM	SiCl4 pre valve closed
10/13/2010	11:16:24 AM	SiCl4 post valve closed
10/13/2010	11:16:24 AM	Main Vac valve closed
10/13/2010	11:16:24 AM	Bubbler valve closed
10/13/2010	11:16:24 AM	Bypass valve opened
10/13/2010	11:16:24 AM	Helium MFC set to  0.000000
10/13/2010	11:16:24 AM	H2 MFC set to  0.000000
10/13/2010	11:16:24 AM	BCl3 MFC set to  0.000000
10/13/2010	11:16:24 AM	PHl3 MFC set to  0.000000
10/13/2010	11:16:24 AM	SiCl4 MFC set to  0.000000
10/13/2010	11:16:24 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	11:16:24 AM	Tube furnace set to 0
10/13/2010	11:16:25 AM	Helium valve closed
10/13/2010	11:16:25 AM	H2 valve closed
10/13/2010	11:16:25 AM	BCl3 valve closed
10/13/2010	11:16:25 AM	PH3 valve closed
10/13/2010	11:16:25 AM	SiCl4 pre valve closed
10/13/2010	11:16:25 AM	SiCl4 post valve closed
10/13/2010	11:16:25 AM	Bubbler valve closed
10/13/2010	11:16:25 AM	Main Vac valve opened
10/13/2010	11:16:25 AM	Bypass valve opened
10/13/2010	11:16:25 AM	Helium MFC set to  0.000000
10/13/2010	11:16:25 AM	H2 MFC set to  0.000000
10/13/2010	11:16:25 AM	BCl3 MFC set to  0.000000
10/13/2010	11:16:25 AM	PHl3 MFC set to  0.000000
10/13/2010	11:16:25 AM	SiCl4 MFC set to  0.000000
10/13/2010	11:16:25 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	11:16:25 AM	Tube furnace set to 0
10/13/2010	11:16:25 AM	Run finished at 11:16 AM
10/13/2010	11:16:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	11:16:51 AM	Tube furnace set to 100
10/13/2010	11:18:10 AM	Recipe started at 11:18 AM
10/13/2010	11:18:10 AM	Helium valve closed
10/13/2010	11:18:10 AM	BCl3 valve closed
10/13/2010	11:18:10 AM	PH3 valve closed
10/13/2010	11:18:10 AM	SiCl4 pre valve closed
10/13/2010	11:18:10 AM	SiCl4 post valve closed
10/13/2010	11:18:10 AM	Main Vac valve closed
10/13/2010	11:18:10 AM	Bypass valve closed
10/13/2010	11:18:10 AM	Bubbler valve closed
10/13/2010	11:18:10 AM	H2 valve opened
10/13/2010	11:18:10 AM	Helium MFC set to  0.000000
10/13/2010	11:18:10 AM	H2 MFC set to  500.000000
10/13/2010	11:18:10 AM	BCl3 MFC set to  0.000000
10/13/2010	11:18:10 AM	PHl3 MFC set to  0.000000
10/13/2010	11:18:10 AM	SiCl4 MFC set to  0.000000
10/13/2010	11:18:10 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	11:18:10 AM	Tube furnace set to 100
10/13/2010	11:19:31 AM	Helium valve closed
10/13/2010	11:19:31 AM	BCl3 valve closed
10/13/2010	11:19:31 AM	PH3 valve closed
10/13/2010	11:19:31 AM	SiCl4 pre valve closed
10/13/2010	11:19:31 AM	SiCl4 post valve closed
10/13/2010	11:19:31 AM	Main Vac valve closed
10/13/2010	11:19:31 AM	Bypass valve closed
10/13/2010	11:19:31 AM	H2 valve opened
10/13/2010	11:19:31 AM	Bubbler valve opened
10/13/2010	11:19:31 AM	Helium MFC set to  0.000000
10/13/2010	11:19:31 AM	H2 MFC set to  500.000000
10/13/2010	11:19:31 AM	BCl3 MFC set to  0.000000
10/13/2010	11:19:31 AM	PHl3 MFC set to  0.000000
10/13/2010	11:19:31 AM	SiCl4 MFC set to  0.000000
10/13/2010	11:19:31 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	11:19:31 AM	Tube furnace set to 1000
10/13/2010	11:39:31 AM	Helium valve closed
10/13/2010	11:39:31 AM	PH3 valve closed
10/13/2010	11:39:31 AM	Main Vac valve closed
10/13/2010	11:39:31 AM	Bypass valve closed
10/13/2010	11:39:31 AM	H2 valve opened
10/13/2010	11:39:31 AM	BCl3 valve opened
10/13/2010	11:39:31 AM	SiCl4 pre valve opened
10/13/2010	11:39:31 AM	SiCl4 post valve opened
10/13/2010	11:39:31 AM	Bubbler valve opened
10/13/2010	11:39:31 AM	Helium MFC set to  0.000000
10/13/2010	11:39:31 AM	H2 MFC set to  500.000000
10/13/2010	11:39:31 AM	BCl3 MFC set to  10.000000
10/13/2010	11:39:31 AM	PHl3 MFC set to  0.000000
10/13/2010	11:39:31 AM	SiCl4 MFC set to  50.000000
10/13/2010	11:39:31 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	11:39:31 AM	Tube furnace set to 1000
10/13/2010	11:51:31 AM	H2 valve closed
10/13/2010	11:51:31 AM	BCl3 valve closed
10/13/2010	11:51:31 AM	PH3 valve closed
10/13/2010	11:51:31 AM	SiCl4 pre valve closed
10/13/2010	11:51:31 AM	SiCl4 post valve closed
10/13/2010	11:51:31 AM	Main Vac valve closed
10/13/2010	11:51:31 AM	Bypass valve closed
10/13/2010	11:51:31 AM	Helium valve opened
10/13/2010	11:51:31 AM	Bubbler valve opened
10/13/2010	11:51:31 AM	Helium MFC set to  500.000000
10/13/2010	11:51:31 AM	H2 MFC set to  0.000000
10/13/2010	11:51:31 AM	BCl3 MFC set to  0.000000
10/13/2010	11:51:31 AM	PHl3 MFC set to  0.000000
10/13/2010	11:51:31 AM	SiCl4 MFC set to  0.000000
10/13/2010	11:51:31 AM	Bypass solenoid MFC set to  0.000000
10/13/2010	11:51:31 AM	Tube furnace set to 0
10/13/2010	12:11:31 PM	Helium valve closed
10/13/2010	12:11:31 PM	H2 valve closed
10/13/2010	12:11:31 PM	BCl3 valve closed
10/13/2010	12:11:31 PM	PH3 valve closed
10/13/2010	12:11:31 PM	SiCl4 pre valve closed
10/13/2010	12:11:31 PM	SiCl4 post valve closed
10/13/2010	12:11:31 PM	Main Vac valve closed
10/13/2010	12:11:31 PM	Bypass valve closed
10/13/2010	12:11:31 PM	Bubbler valve closed
10/13/2010	12:11:31 PM	Helium MFC set to  0.000000
10/13/2010	12:11:31 PM	H2 MFC set to  0.000000
10/13/2010	12:11:31 PM	BCl3 MFC set to  0.000000
10/13/2010	12:11:31 PM	PHl3 MFC set to  0.000000
10/13/2010	12:11:31 PM	SiCl4 MFC set to  0.000000
10/13/2010	12:11:31 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	12:11:31 PM	Tube furnace set to 0
10/13/2010	12:11:31 PM	Run finished at 12:11 PM
10/13/2010	1:14:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	1:14:56 PM	Recipe started at 1:14 PM
10/13/2010	1:14:56 PM	Helium valve closed
10/13/2010	1:14:56 PM	H2 valve closed
10/13/2010	1:14:56 PM	BCl3 valve closed
10/13/2010	1:14:56 PM	PH3 valve closed
10/13/2010	1:14:56 PM	SiCl4 pre valve closed
10/13/2010	1:14:56 PM	SiCl4 post valve closed
10/13/2010	1:14:56 PM	Main Vac valve closed
10/13/2010	1:14:56 PM	Bubbler valve closed
10/13/2010	1:14:56 PM	Bypass valve opened
10/13/2010	1:14:56 PM	Helium MFC set to  0.000000
10/13/2010	1:14:56 PM	H2 MFC set to  0.000000
10/13/2010	1:14:56 PM	BCl3 MFC set to  0.000000
10/13/2010	1:14:56 PM	PHl3 MFC set to  0.000000
10/13/2010	1:14:56 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:14:56 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:14:56 PM	Tube furnace set to 0
10/13/2010	1:15:47 PM	Helium valve closed
10/13/2010	1:15:47 PM	H2 valve closed
10/13/2010	1:15:47 PM	BCl3 valve closed
10/13/2010	1:15:47 PM	PH3 valve closed
10/13/2010	1:15:47 PM	SiCl4 pre valve closed
10/13/2010	1:15:47 PM	SiCl4 post valve closed
10/13/2010	1:15:47 PM	Bubbler valve closed
10/13/2010	1:15:47 PM	Main Vac valve opened
10/13/2010	1:15:47 PM	Bypass valve opened
10/13/2010	1:15:47 PM	Helium MFC set to  0.000000
10/13/2010	1:15:47 PM	H2 MFC set to  0.000000
10/13/2010	1:15:47 PM	BCl3 MFC set to  0.000000
10/13/2010	1:15:47 PM	PHl3 MFC set to  0.000000
10/13/2010	1:15:47 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:15:47 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:15:47 PM	Tube furnace set to 0
10/13/2010	1:15:47 PM	Run finished at 1:15 PM
10/13/2010	1:15:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	1:16:07 PM	Helium valve opened
10/13/2010	1:16:11 PM	Helium MFC set to  100.000000
10/13/2010	1:16:46 PM	Helium valve closed
10/13/2010	1:16:48 PM	Helium MFC set to  0.000000
10/13/2010	1:23:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/13/2010	1:23:36 PM	Recipe started at 1:23 PM
10/13/2010	1:23:36 PM	Helium valve closed
10/13/2010	1:23:36 PM	H2 valve closed
10/13/2010	1:23:36 PM	BCl3 valve closed
10/13/2010	1:23:36 PM	PH3 valve closed
10/13/2010	1:23:36 PM	SiCl4 pre valve closed
10/13/2010	1:23:36 PM	SiCl4 post valve closed
10/13/2010	1:23:36 PM	Main Vac valve closed
10/13/2010	1:23:36 PM	Bubbler valve closed
10/13/2010	1:23:36 PM	Bypass valve opened
10/13/2010	1:23:36 PM	Helium MFC set to  0.000000
10/13/2010	1:23:36 PM	H2 MFC set to  0.000000
10/13/2010	1:23:36 PM	BCl3 MFC set to  0.000000
10/13/2010	1:23:36 PM	PHl3 MFC set to  0.000000
10/13/2010	1:23:36 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:23:36 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:23:36 PM	Tube furnace set to 0
10/13/2010	1:23:36 PM	Helium valve closed
10/13/2010	1:23:36 PM	H2 valve closed
10/13/2010	1:23:36 PM	BCl3 valve closed
10/13/2010	1:23:36 PM	PH3 valve closed
10/13/2010	1:23:36 PM	SiCl4 pre valve closed
10/13/2010	1:23:36 PM	SiCl4 post valve closed
10/13/2010	1:23:36 PM	Bubbler valve closed
10/13/2010	1:23:36 PM	Main Vac valve opened
10/13/2010	1:23:36 PM	Bypass valve opened
10/13/2010	1:23:36 PM	Helium MFC set to  0.000000
10/13/2010	1:23:36 PM	H2 MFC set to  0.000000
10/13/2010	1:23:36 PM	BCl3 MFC set to  0.000000
10/13/2010	1:23:36 PM	PHl3 MFC set to  0.000000
10/13/2010	1:23:36 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:23:36 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:23:37 PM	Tube furnace set to 0
10/13/2010	1:24:37 PM	H2 valve closed
10/13/2010	1:24:37 PM	BCl3 valve closed
10/13/2010	1:24:37 PM	PH3 valve closed
10/13/2010	1:24:37 PM	SiCl4 pre valve closed
10/13/2010	1:24:37 PM	SiCl4 post valve closed
10/13/2010	1:24:37 PM	Bubbler valve closed
10/13/2010	1:24:37 PM	Helium valve opened
10/13/2010	1:24:37 PM	Main Vac valve opened
10/13/2010	1:24:37 PM	Bypass valve opened
10/13/2010	1:24:37 PM	Helium MFC set to  100.000000
10/13/2010	1:24:37 PM	H2 MFC set to  0.000000
10/13/2010	1:24:37 PM	BCl3 MFC set to  0.000000
10/13/2010	1:24:37 PM	PHl3 MFC set to  0.000000
10/13/2010	1:24:37 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:24:37 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:24:37 PM	Tube furnace set to 0
10/13/2010	1:25:37 PM	Helium valve closed
10/13/2010	1:25:37 PM	H2 valve closed
10/13/2010	1:25:37 PM	BCl3 valve closed
10/13/2010	1:25:37 PM	PH3 valve closed
10/13/2010	1:25:37 PM	SiCl4 pre valve closed
10/13/2010	1:25:37 PM	SiCl4 post valve closed
10/13/2010	1:25:37 PM	Bubbler valve closed
10/13/2010	1:25:37 PM	Main Vac valve opened
10/13/2010	1:25:37 PM	Bypass valve opened
10/13/2010	1:25:37 PM	Helium MFC set to  0.000000
10/13/2010	1:25:37 PM	H2 MFC set to  0.000000
10/13/2010	1:25:37 PM	BCl3 MFC set to  0.000000
10/13/2010	1:25:37 PM	PHl3 MFC set to  0.000000
10/13/2010	1:25:37 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:25:37 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:25:37 PM	Tube furnace set to 0
10/13/2010	1:26:37 PM	H2 valve closed
10/13/2010	1:26:37 PM	BCl3 valve closed
10/13/2010	1:26:37 PM	PH3 valve closed
10/13/2010	1:26:37 PM	SiCl4 pre valve closed
10/13/2010	1:26:37 PM	SiCl4 post valve closed
10/13/2010	1:26:37 PM	Bubbler valve closed
10/13/2010	1:26:37 PM	Helium valve opened
10/13/2010	1:26:37 PM	Main Vac valve opened
10/13/2010	1:26:37 PM	Bypass valve opened
10/13/2010	1:26:37 PM	Helium MFC set to  100.000000
10/13/2010	1:26:37 PM	H2 MFC set to  0.000000
10/13/2010	1:26:37 PM	BCl3 MFC set to  0.000000
10/13/2010	1:26:37 PM	PHl3 MFC set to  0.000000
10/13/2010	1:26:37 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:26:37 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:26:37 PM	Tube furnace set to 0
10/13/2010	1:27:37 PM	Helium valve closed
10/13/2010	1:27:37 PM	H2 valve closed
10/13/2010	1:27:37 PM	BCl3 valve closed
10/13/2010	1:27:37 PM	PH3 valve closed
10/13/2010	1:27:37 PM	SiCl4 pre valve closed
10/13/2010	1:27:37 PM	SiCl4 post valve closed
10/13/2010	1:27:37 PM	Bubbler valve closed
10/13/2010	1:27:37 PM	Main Vac valve opened
10/13/2010	1:27:37 PM	Bypass valve opened
10/13/2010	1:27:37 PM	Helium MFC set to  0.000000
10/13/2010	1:27:37 PM	H2 MFC set to  0.000000
10/13/2010	1:27:37 PM	BCl3 MFC set to  0.000000
10/13/2010	1:27:37 PM	PHl3 MFC set to  0.000000
10/13/2010	1:27:37 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:27:37 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:27:37 PM	Tube furnace set to 0
10/13/2010	1:28:37 PM	H2 valve closed
10/13/2010	1:28:37 PM	BCl3 valve closed
10/13/2010	1:28:37 PM	PH3 valve closed
10/13/2010	1:28:37 PM	SiCl4 pre valve closed
10/13/2010	1:28:37 PM	SiCl4 post valve closed
10/13/2010	1:28:37 PM	Bubbler valve closed
10/13/2010	1:28:37 PM	Helium valve opened
10/13/2010	1:28:37 PM	Main Vac valve opened
10/13/2010	1:28:37 PM	Bypass valve opened
10/13/2010	1:28:37 PM	Helium MFC set to  100.000000
10/13/2010	1:28:37 PM	H2 MFC set to  0.000000
10/13/2010	1:28:37 PM	BCl3 MFC set to  0.000000
10/13/2010	1:28:37 PM	PHl3 MFC set to  0.000000
10/13/2010	1:28:37 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:28:37 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:28:38 PM	Tube furnace set to 0
10/13/2010	1:29:38 PM	Helium valve closed
10/13/2010	1:29:38 PM	H2 valve closed
10/13/2010	1:29:38 PM	BCl3 valve closed
10/13/2010	1:29:38 PM	PH3 valve closed
10/13/2010	1:29:38 PM	SiCl4 pre valve closed
10/13/2010	1:29:38 PM	SiCl4 post valve closed
10/13/2010	1:29:38 PM	Bubbler valve closed
10/13/2010	1:29:38 PM	Main Vac valve opened
10/13/2010	1:29:38 PM	Bypass valve opened
10/13/2010	1:29:38 PM	Helium MFC set to  0.000000
10/13/2010	1:29:38 PM	H2 MFC set to  0.000000
10/13/2010	1:29:38 PM	BCl3 MFC set to  0.000000
10/13/2010	1:29:38 PM	PHl3 MFC set to  0.000000
10/13/2010	1:29:38 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:29:38 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:29:38 PM	Tube furnace set to 0
10/13/2010	1:30:38 PM	H2 valve closed
10/13/2010	1:30:38 PM	BCl3 valve closed
10/13/2010	1:30:38 PM	PH3 valve closed
10/13/2010	1:30:38 PM	SiCl4 pre valve closed
10/13/2010	1:30:38 PM	SiCl4 post valve closed
10/13/2010	1:30:38 PM	Bubbler valve closed
10/13/2010	1:30:38 PM	Helium valve opened
10/13/2010	1:30:38 PM	Main Vac valve opened
10/13/2010	1:30:38 PM	Bypass valve opened
10/13/2010	1:30:38 PM	Helium MFC set to  100.000000
10/13/2010	1:30:38 PM	H2 MFC set to  0.000000
10/13/2010	1:30:38 PM	BCl3 MFC set to  0.000000
10/13/2010	1:30:38 PM	PHl3 MFC set to  0.000000
10/13/2010	1:30:38 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:30:38 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:30:38 PM	Tube furnace set to 0
10/13/2010	1:31:38 PM	Helium valve closed
10/13/2010	1:31:38 PM	H2 valve closed
10/13/2010	1:31:38 PM	BCl3 valve closed
10/13/2010	1:31:38 PM	PH3 valve closed
10/13/2010	1:31:38 PM	SiCl4 pre valve closed
10/13/2010	1:31:38 PM	SiCl4 post valve closed
10/13/2010	1:31:38 PM	Bubbler valve closed
10/13/2010	1:31:38 PM	Main Vac valve opened
10/13/2010	1:31:38 PM	Bypass valve opened
10/13/2010	1:31:38 PM	Helium MFC set to  0.000000
10/13/2010	1:31:38 PM	H2 MFC set to  0.000000
10/13/2010	1:31:38 PM	BCl3 MFC set to  0.000000
10/13/2010	1:31:38 PM	PHl3 MFC set to  0.000000
10/13/2010	1:31:38 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:31:38 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:31:38 PM	Tube furnace set to 0
10/13/2010	1:32:38 PM	H2 valve closed
10/13/2010	1:32:38 PM	BCl3 valve closed
10/13/2010	1:32:38 PM	PH3 valve closed
10/13/2010	1:32:38 PM	SiCl4 pre valve closed
10/13/2010	1:32:38 PM	SiCl4 post valve closed
10/13/2010	1:32:38 PM	Bubbler valve closed
10/13/2010	1:32:38 PM	Helium valve opened
10/13/2010	1:32:38 PM	Main Vac valve opened
10/13/2010	1:32:38 PM	Bypass valve opened
10/13/2010	1:32:38 PM	Helium MFC set to  100.000000
10/13/2010	1:32:38 PM	H2 MFC set to  0.000000
10/13/2010	1:32:38 PM	BCl3 MFC set to  0.000000
10/13/2010	1:32:38 PM	PHl3 MFC set to  0.000000
10/13/2010	1:32:38 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:32:38 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:32:38 PM	Tube furnace set to 0
10/13/2010	1:33:38 PM	Helium valve closed
10/13/2010	1:33:38 PM	H2 valve closed
10/13/2010	1:33:38 PM	BCl3 valve closed
10/13/2010	1:33:38 PM	PH3 valve closed
10/13/2010	1:33:38 PM	SiCl4 pre valve closed
10/13/2010	1:33:38 PM	SiCl4 post valve closed
10/13/2010	1:33:38 PM	Bubbler valve closed
10/13/2010	1:33:38 PM	Main Vac valve opened
10/13/2010	1:33:38 PM	Bypass valve opened
10/13/2010	1:33:38 PM	Helium MFC set to  0.000000
10/13/2010	1:33:38 PM	H2 MFC set to  0.000000
10/13/2010	1:33:38 PM	BCl3 MFC set to  0.000000
10/13/2010	1:33:38 PM	PHl3 MFC set to  0.000000
10/13/2010	1:33:38 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:33:38 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:33:39 PM	Tube furnace set to 0
10/13/2010	1:34:39 PM	H2 valve closed
10/13/2010	1:34:39 PM	BCl3 valve closed
10/13/2010	1:34:39 PM	PH3 valve closed
10/13/2010	1:34:39 PM	SiCl4 pre valve closed
10/13/2010	1:34:39 PM	SiCl4 post valve closed
10/13/2010	1:34:39 PM	Bubbler valve closed
10/13/2010	1:34:39 PM	Helium valve opened
10/13/2010	1:34:39 PM	Main Vac valve opened
10/13/2010	1:34:39 PM	Bypass valve opened
10/13/2010	1:34:39 PM	Helium MFC set to  100.000000
10/13/2010	1:34:39 PM	H2 MFC set to  0.000000
10/13/2010	1:34:39 PM	BCl3 MFC set to  0.000000
10/13/2010	1:34:39 PM	PHl3 MFC set to  0.000000
10/13/2010	1:34:39 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:34:39 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:34:39 PM	Tube furnace set to 0
10/13/2010	1:35:39 PM	Helium valve closed
10/13/2010	1:35:39 PM	H2 valve closed
10/13/2010	1:35:39 PM	BCl3 valve closed
10/13/2010	1:35:39 PM	PH3 valve closed
10/13/2010	1:35:39 PM	SiCl4 pre valve closed
10/13/2010	1:35:39 PM	SiCl4 post valve closed
10/13/2010	1:35:39 PM	Bubbler valve closed
10/13/2010	1:35:39 PM	Main Vac valve opened
10/13/2010	1:35:39 PM	Bypass valve opened
10/13/2010	1:35:39 PM	Helium MFC set to  0.000000
10/13/2010	1:35:39 PM	H2 MFC set to  0.000000
10/13/2010	1:35:39 PM	BCl3 MFC set to  0.000000
10/13/2010	1:35:39 PM	PHl3 MFC set to  0.000000
10/13/2010	1:35:39 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:35:39 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:35:39 PM	Tube furnace set to 0
10/13/2010	1:36:39 PM	H2 valve closed
10/13/2010	1:36:39 PM	BCl3 valve closed
10/13/2010	1:36:39 PM	PH3 valve closed
10/13/2010	1:36:39 PM	SiCl4 pre valve closed
10/13/2010	1:36:39 PM	SiCl4 post valve closed
10/13/2010	1:36:39 PM	Bubbler valve closed
10/13/2010	1:36:39 PM	Helium valve opened
10/13/2010	1:36:39 PM	Main Vac valve opened
10/13/2010	1:36:39 PM	Bypass valve opened
10/13/2010	1:36:39 PM	Helium MFC set to  100.000000
10/13/2010	1:36:39 PM	H2 MFC set to  0.000000
10/13/2010	1:36:39 PM	BCl3 MFC set to  0.000000
10/13/2010	1:36:39 PM	PHl3 MFC set to  0.000000
10/13/2010	1:36:39 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:36:39 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:36:39 PM	Tube furnace set to 0
10/13/2010	1:37:39 PM	Helium valve closed
10/13/2010	1:37:39 PM	H2 valve closed
10/13/2010	1:37:39 PM	BCl3 valve closed
10/13/2010	1:37:39 PM	PH3 valve closed
10/13/2010	1:37:39 PM	SiCl4 pre valve closed
10/13/2010	1:37:39 PM	SiCl4 post valve closed
10/13/2010	1:37:39 PM	Bubbler valve closed
10/13/2010	1:37:39 PM	Main Vac valve opened
10/13/2010	1:37:39 PM	Bypass valve opened
10/13/2010	1:37:39 PM	Helium MFC set to  0.000000
10/13/2010	1:37:39 PM	H2 MFC set to  0.000000
10/13/2010	1:37:39 PM	BCl3 MFC set to  0.000000
10/13/2010	1:37:39 PM	PHl3 MFC set to  0.000000
10/13/2010	1:37:39 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:37:39 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:37:39 PM	Tube furnace set to 0
10/13/2010	1:38:39 PM	H2 valve closed
10/13/2010	1:38:39 PM	BCl3 valve closed
10/13/2010	1:38:39 PM	PH3 valve closed
10/13/2010	1:38:39 PM	SiCl4 pre valve closed
10/13/2010	1:38:39 PM	SiCl4 post valve closed
10/13/2010	1:38:39 PM	Bubbler valve closed
10/13/2010	1:38:39 PM	Helium valve opened
10/13/2010	1:38:39 PM	Main Vac valve opened
10/13/2010	1:38:39 PM	Bypass valve opened
10/13/2010	1:38:39 PM	Helium MFC set to  100.000000
10/13/2010	1:38:39 PM	H2 MFC set to  0.000000
10/13/2010	1:38:39 PM	BCl3 MFC set to  0.000000
10/13/2010	1:38:39 PM	PHl3 MFC set to  0.000000
10/13/2010	1:38:39 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:38:39 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:38:40 PM	Tube furnace set to 0
10/13/2010	1:39:40 PM	Helium valve closed
10/13/2010	1:39:40 PM	H2 valve closed
10/13/2010	1:39:40 PM	BCl3 valve closed
10/13/2010	1:39:40 PM	PH3 valve closed
10/13/2010	1:39:40 PM	SiCl4 pre valve closed
10/13/2010	1:39:40 PM	SiCl4 post valve closed
10/13/2010	1:39:40 PM	Bubbler valve closed
10/13/2010	1:39:40 PM	Main Vac valve opened
10/13/2010	1:39:40 PM	Bypass valve opened
10/13/2010	1:39:40 PM	Helium MFC set to  0.000000
10/13/2010	1:39:40 PM	H2 MFC set to  0.000000
10/13/2010	1:39:40 PM	BCl3 MFC set to  0.000000
10/13/2010	1:39:40 PM	PHl3 MFC set to  0.000000
10/13/2010	1:39:40 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:39:40 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:39:40 PM	Tube furnace set to 0
10/13/2010	1:40:40 PM	H2 valve closed
10/13/2010	1:40:40 PM	BCl3 valve closed
10/13/2010	1:40:40 PM	PH3 valve closed
10/13/2010	1:40:40 PM	SiCl4 pre valve closed
10/13/2010	1:40:40 PM	SiCl4 post valve closed
10/13/2010	1:40:40 PM	Bubbler valve closed
10/13/2010	1:40:40 PM	Helium valve opened
10/13/2010	1:40:40 PM	Main Vac valve opened
10/13/2010	1:40:40 PM	Bypass valve opened
10/13/2010	1:40:40 PM	Helium MFC set to  100.000000
10/13/2010	1:40:40 PM	H2 MFC set to  0.000000
10/13/2010	1:40:40 PM	BCl3 MFC set to  0.000000
10/13/2010	1:40:40 PM	PHl3 MFC set to  0.000000
10/13/2010	1:40:40 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:40:40 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:40:40 PM	Tube furnace set to 0
10/13/2010	1:41:40 PM	Helium valve closed
10/13/2010	1:41:40 PM	H2 valve closed
10/13/2010	1:41:40 PM	BCl3 valve closed
10/13/2010	1:41:40 PM	PH3 valve closed
10/13/2010	1:41:40 PM	SiCl4 pre valve closed
10/13/2010	1:41:40 PM	SiCl4 post valve closed
10/13/2010	1:41:40 PM	Bubbler valve closed
10/13/2010	1:41:40 PM	Main Vac valve opened
10/13/2010	1:41:40 PM	Bypass valve opened
10/13/2010	1:41:40 PM	Helium MFC set to  0.000000
10/13/2010	1:41:40 PM	H2 MFC set to  0.000000
10/13/2010	1:41:40 PM	BCl3 MFC set to  0.000000
10/13/2010	1:41:40 PM	PHl3 MFC set to  0.000000
10/13/2010	1:41:40 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:41:40 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:41:40 PM	Tube furnace set to 0
10/13/2010	1:42:40 PM	H2 valve closed
10/13/2010	1:42:40 PM	BCl3 valve closed
10/13/2010	1:42:40 PM	PH3 valve closed
10/13/2010	1:42:40 PM	SiCl4 pre valve closed
10/13/2010	1:42:40 PM	SiCl4 post valve closed
10/13/2010	1:42:40 PM	Bubbler valve closed
10/13/2010	1:42:40 PM	Helium valve opened
10/13/2010	1:42:40 PM	Main Vac valve opened
10/13/2010	1:42:40 PM	Bypass valve opened
10/13/2010	1:42:40 PM	Helium MFC set to  100.000000
10/13/2010	1:42:40 PM	H2 MFC set to  0.000000
10/13/2010	1:42:40 PM	BCl3 MFC set to  0.000000
10/13/2010	1:42:40 PM	PHl3 MFC set to  0.000000
10/13/2010	1:42:40 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:42:40 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:42:40 PM	Tube furnace set to 0
10/13/2010	1:43:40 PM	Helium valve closed
10/13/2010	1:43:40 PM	H2 valve closed
10/13/2010	1:43:40 PM	BCl3 valve closed
10/13/2010	1:43:40 PM	PH3 valve closed
10/13/2010	1:43:40 PM	SiCl4 pre valve closed
10/13/2010	1:43:40 PM	SiCl4 post valve closed
10/13/2010	1:43:40 PM	Bubbler valve closed
10/13/2010	1:43:40 PM	Main Vac valve opened
10/13/2010	1:43:40 PM	Bypass valve opened
10/13/2010	1:43:40 PM	Helium MFC set to  0.000000
10/13/2010	1:43:40 PM	H2 MFC set to  0.000000
10/13/2010	1:43:40 PM	BCl3 MFC set to  0.000000
10/13/2010	1:43:40 PM	PHl3 MFC set to  0.000000
10/13/2010	1:43:40 PM	SiCl4 MFC set to  0.000000
10/13/2010	1:43:40 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	1:43:40 PM	Tube furnace set to 0
10/13/2010	1:43:41 PM	Run finished at 1:43 PM
10/13/2010	1:43:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/13/2010	2:01:50 PM	Bypass valve closed
10/13/2010	2:01:51 PM	Main Vac valve closed
10/13/2010	2:01:54 PM	Main Vac valve opened
10/13/2010	2:01:55 PM	Bypass valve opened
10/13/2010	2:01:57 PM	Helium valve opened
10/13/2010	2:01:59 PM	Helium MFC set to  100.000000
10/13/2010	2:03:44 PM	Helium valve closed
10/13/2010	2:03:47 PM	Tube furnace set to 100
10/13/2010	2:49:13 PM	Helium valve opened
10/13/2010	2:49:20 PM	Helium valve closed
10/13/2010	2:50:58 PM	Recipe started at 2:50 PM
10/13/2010	2:50:58 PM	Helium valve closed
10/13/2010	2:50:58 PM	BCl3 valve closed
10/13/2010	2:50:58 PM	PH3 valve closed
10/13/2010	2:50:58 PM	SiCl4 pre valve closed
10/13/2010	2:50:58 PM	SiCl4 post valve closed
10/13/2010	2:50:58 PM	Main Vac valve closed
10/13/2010	2:50:58 PM	Bypass valve closed
10/13/2010	2:50:58 PM	Bubbler valve closed
10/13/2010	2:50:58 PM	H2 valve opened
10/13/2010	2:50:58 PM	Helium MFC set to  0.000000
10/13/2010	2:50:58 PM	H2 MFC set to  500.000000
10/13/2010	2:50:58 PM	BCl3 MFC set to  0.000000
10/13/2010	2:50:58 PM	PHl3 MFC set to  0.000000
10/13/2010	2:50:58 PM	SiCl4 MFC set to  0.000000
10/13/2010	2:50:58 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	2:50:58 PM	Tube furnace set to 100
10/13/2010	2:52:18 PM	Helium valve closed
10/13/2010	2:52:18 PM	BCl3 valve closed
10/13/2010	2:52:18 PM	PH3 valve closed
10/13/2010	2:52:18 PM	SiCl4 pre valve closed
10/13/2010	2:52:18 PM	SiCl4 post valve closed
10/13/2010	2:52:18 PM	Main Vac valve closed
10/13/2010	2:52:18 PM	Bypass valve closed
10/13/2010	2:52:18 PM	H2 valve opened
10/13/2010	2:52:18 PM	Bubbler valve opened
10/13/2010	2:52:18 PM	Helium MFC set to  0.000000
10/13/2010	2:52:18 PM	H2 MFC set to  500.000000
10/13/2010	2:52:18 PM	BCl3 MFC set to  0.000000
10/13/2010	2:52:18 PM	PHl3 MFC set to  0.000000
10/13/2010	2:52:18 PM	SiCl4 MFC set to  0.000000
10/13/2010	2:52:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	2:52:18 PM	Tube furnace set to 1000
10/13/2010	3:12:18 PM	Helium valve closed
10/13/2010	3:12:18 PM	PH3 valve closed
10/13/2010	3:12:18 PM	Main Vac valve closed
10/13/2010	3:12:18 PM	Bypass valve closed
10/13/2010	3:12:18 PM	H2 valve opened
10/13/2010	3:12:18 PM	BCl3 valve opened
10/13/2010	3:12:18 PM	SiCl4 pre valve opened
10/13/2010	3:12:18 PM	SiCl4 post valve opened
10/13/2010	3:12:18 PM	Bubbler valve opened
10/13/2010	3:12:18 PM	Helium MFC set to  0.000000
10/13/2010	3:12:18 PM	H2 MFC set to  500.000000
10/13/2010	3:12:18 PM	BCl3 MFC set to  10.000000
10/13/2010	3:12:18 PM	PHl3 MFC set to  0.000000
10/13/2010	3:12:18 PM	SiCl4 MFC set to  50.000000
10/13/2010	3:12:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	3:12:18 PM	Tube furnace set to 1000
10/13/2010	3:24:18 PM	H2 valve closed
10/13/2010	3:24:18 PM	BCl3 valve closed
10/13/2010	3:24:18 PM	PH3 valve closed
10/13/2010	3:24:18 PM	SiCl4 pre valve closed
10/13/2010	3:24:18 PM	SiCl4 post valve closed
10/13/2010	3:24:18 PM	Main Vac valve closed
10/13/2010	3:24:18 PM	Bypass valve closed
10/13/2010	3:24:18 PM	Helium valve opened
10/13/2010	3:24:18 PM	Bubbler valve opened
10/13/2010	3:24:18 PM	Helium MFC set to  500.000000
10/13/2010	3:24:18 PM	H2 MFC set to  0.000000
10/13/2010	3:24:18 PM	BCl3 MFC set to  0.000000
10/13/2010	3:24:18 PM	PHl3 MFC set to  0.000000
10/13/2010	3:24:18 PM	SiCl4 MFC set to  0.000000
10/13/2010	3:24:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	3:24:18 PM	Tube furnace set to 0
10/13/2010	3:44:18 PM	Helium valve closed
10/13/2010	3:44:18 PM	H2 valve closed
10/13/2010	3:44:18 PM	BCl3 valve closed
10/13/2010	3:44:18 PM	PH3 valve closed
10/13/2010	3:44:18 PM	SiCl4 pre valve closed
10/13/2010	3:44:18 PM	SiCl4 post valve closed
10/13/2010	3:44:18 PM	Main Vac valve closed
10/13/2010	3:44:18 PM	Bypass valve closed
10/13/2010	3:44:18 PM	Bubbler valve closed
10/13/2010	3:44:18 PM	Helium MFC set to  0.000000
10/13/2010	3:44:18 PM	H2 MFC set to  0.000000
10/13/2010	3:44:18 PM	BCl3 MFC set to  0.000000
10/13/2010	3:44:18 PM	PHl3 MFC set to  0.000000
10/13/2010	3:44:18 PM	SiCl4 MFC set to  0.000000
10/13/2010	3:44:18 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	3:44:18 PM	Tube furnace set to 0
10/13/2010	3:44:19 PM	Run finished at 3:44 PM
10/13/2010	4:26:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	4:26:52 PM	Recipe started at 4:26 PM
10/13/2010	4:26:52 PM	Helium valve closed
10/13/2010	4:26:52 PM	H2 valve closed
10/13/2010	4:26:52 PM	BCl3 valve closed
10/13/2010	4:26:52 PM	PH3 valve closed
10/13/2010	4:26:52 PM	SiCl4 pre valve closed
10/13/2010	4:26:52 PM	SiCl4 post valve closed
10/13/2010	4:26:52 PM	Main Vac valve closed
10/13/2010	4:26:52 PM	Bubbler valve closed
10/13/2010	4:26:52 PM	Bypass valve opened
10/13/2010	4:26:52 PM	Helium MFC set to  0.000000
10/13/2010	4:26:52 PM	H2 MFC set to  0.000000
10/13/2010	4:26:52 PM	BCl3 MFC set to  0.000000
10/13/2010	4:26:52 PM	PHl3 MFC set to  0.000000
10/13/2010	4:26:52 PM	SiCl4 MFC set to  0.000000
10/13/2010	4:26:52 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	4:26:52 PM	Tube furnace set to 0
10/13/2010	4:27:45 PM	Helium valve closed
10/13/2010	4:27:45 PM	H2 valve closed
10/13/2010	4:27:45 PM	BCl3 valve closed
10/13/2010	4:27:45 PM	PH3 valve closed
10/13/2010	4:27:45 PM	SiCl4 pre valve closed
10/13/2010	4:27:45 PM	SiCl4 post valve closed
10/13/2010	4:27:45 PM	Bubbler valve closed
10/13/2010	4:27:45 PM	Main Vac valve opened
10/13/2010	4:27:45 PM	Bypass valve opened
10/13/2010	4:27:45 PM	Helium MFC set to  0.000000
10/13/2010	4:27:45 PM	H2 MFC set to  0.000000
10/13/2010	4:27:45 PM	BCl3 MFC set to  0.000000
10/13/2010	4:27:45 PM	PHl3 MFC set to  0.000000
10/13/2010	4:27:45 PM	SiCl4 MFC set to  0.000000
10/13/2010	4:27:45 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	4:27:45 PM	Tube furnace set to 0
10/13/2010	4:27:45 PM	Run finished at 4:27 PM
10/13/2010	4:27:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/13/2010	6:07:05 PM	Recipe started at 6:07 PM
10/13/2010	6:07:05 PM	Helium valve closed
10/13/2010	6:07:05 PM	BCl3 valve closed
10/13/2010	6:07:05 PM	PH3 valve closed
10/13/2010	6:07:05 PM	SiCl4 pre valve closed
10/13/2010	6:07:05 PM	SiCl4 post valve closed
10/13/2010	6:07:05 PM	Main Vac valve closed
10/13/2010	6:07:05 PM	Bypass valve closed
10/13/2010	6:07:05 PM	Bubbler valve closed
10/13/2010	6:07:05 PM	H2 valve opened
10/13/2010	6:07:05 PM	Helium MFC set to  0.000000
10/13/2010	6:07:05 PM	H2 MFC set to  500.000000
10/13/2010	6:07:05 PM	BCl3 MFC set to  0.000000
10/13/2010	6:07:05 PM	PHl3 MFC set to  0.000000
10/13/2010	6:07:05 PM	SiCl4 MFC set to  0.000000
10/13/2010	6:07:05 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	6:07:05 PM	Tube furnace set to 100
10/13/2010	6:08:26 PM	Helium valve closed
10/13/2010	6:08:26 PM	BCl3 valve closed
10/13/2010	6:08:26 PM	PH3 valve closed
10/13/2010	6:08:26 PM	SiCl4 pre valve closed
10/13/2010	6:08:26 PM	SiCl4 post valve closed
10/13/2010	6:08:26 PM	Main Vac valve closed
10/13/2010	6:08:26 PM	Bypass valve closed
10/13/2010	6:08:26 PM	H2 valve opened
10/13/2010	6:08:26 PM	Bubbler valve opened
10/13/2010	6:08:26 PM	Helium MFC set to  0.000000
10/13/2010	6:08:26 PM	H2 MFC set to  500.000000
10/13/2010	6:08:26 PM	BCl3 MFC set to  0.000000
10/13/2010	6:08:26 PM	PHl3 MFC set to  0.000000
10/13/2010	6:08:26 PM	SiCl4 MFC set to  0.000000
10/13/2010	6:08:26 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	6:08:26 PM	Tube furnace set to 1000
10/13/2010	6:28:26 PM	Helium valve closed
10/13/2010	6:28:26 PM	PH3 valve closed
10/13/2010	6:28:26 PM	Main Vac valve closed
10/13/2010	6:28:26 PM	Bypass valve closed
10/13/2010	6:28:26 PM	H2 valve opened
10/13/2010	6:28:26 PM	BCl3 valve opened
10/13/2010	6:28:26 PM	SiCl4 pre valve opened
10/13/2010	6:28:26 PM	SiCl4 post valve opened
10/13/2010	6:28:26 PM	Bubbler valve opened
10/13/2010	6:28:26 PM	Helium MFC set to  0.000000
10/13/2010	6:28:26 PM	H2 MFC set to  500.000000
10/13/2010	6:28:26 PM	BCl3 MFC set to  10.000000
10/13/2010	6:28:26 PM	PHl3 MFC set to  0.000000
10/13/2010	6:28:26 PM	SiCl4 MFC set to  50.000000
10/13/2010	6:28:26 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	6:28:26 PM	Tube furnace set to 1000
10/13/2010	6:40:26 PM	H2 valve closed
10/13/2010	6:40:26 PM	BCl3 valve closed
10/13/2010	6:40:26 PM	PH3 valve closed
10/13/2010	6:40:26 PM	SiCl4 pre valve closed
10/13/2010	6:40:26 PM	SiCl4 post valve closed
10/13/2010	6:40:26 PM	Main Vac valve closed
10/13/2010	6:40:26 PM	Bypass valve closed
10/13/2010	6:40:26 PM	Helium valve opened
10/13/2010	6:40:26 PM	Bubbler valve opened
10/13/2010	6:40:26 PM	Helium MFC set to  500.000000
10/13/2010	6:40:26 PM	H2 MFC set to  0.000000
10/13/2010	6:40:26 PM	BCl3 MFC set to  0.000000
10/13/2010	6:40:26 PM	PHl3 MFC set to  0.000000
10/13/2010	6:40:26 PM	SiCl4 MFC set to  0.000000
10/13/2010	6:40:26 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	6:40:26 PM	Tube furnace set to 0
10/13/2010	7:00:26 PM	Helium valve closed
10/13/2010	7:00:26 PM	H2 valve closed
10/13/2010	7:00:26 PM	BCl3 valve closed
10/13/2010	7:00:26 PM	PH3 valve closed
10/13/2010	7:00:26 PM	SiCl4 pre valve closed
10/13/2010	7:00:26 PM	SiCl4 post valve closed
10/13/2010	7:00:26 PM	Main Vac valve closed
10/13/2010	7:00:26 PM	Bypass valve closed
10/13/2010	7:00:26 PM	Bubbler valve closed
10/13/2010	7:00:26 PM	Helium MFC set to  0.000000
10/13/2010	7:00:26 PM	H2 MFC set to  0.000000
10/13/2010	7:00:26 PM	BCl3 MFC set to  0.000000
10/13/2010	7:00:26 PM	PHl3 MFC set to  0.000000
10/13/2010	7:00:26 PM	SiCl4 MFC set to  0.000000
10/13/2010	7:00:26 PM	Bypass solenoid MFC set to  0.000000
10/13/2010	7:00:26 PM	Tube furnace set to 0
10/13/2010	7:00:26 PM	Run finished at 7:00 PM
